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Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems
Qingsong Xu, Kok Kiong Tan
Verlag Springer-Verlag, 2015
ISBN 9783319216232 , 266 Seiten
Format PDF, OL
Kopierschutz Wasserzeichen
Geräte
Series Editors' Foreword
7
Preface
9
Contents
13
Abbreviations
19
1 Introduction
21
1.1 Micro-/Nano-positioning Technique
21
1.2 Actuators and Sensors
22
1.3 Piezoelectric Nonlinearity
24
1.4 Feedforward Control Based on Hysteresis Models
25
1.4.1 Conventional Hysteresis Model
26
1.4.2 Intelligent Hysteresis Model
28
1.4.3 Feedforward Plus Feedback Control
28
1.5 Robust Feedback Control
29
1.5.1 Sliding-Mode Control
30
1.5.2 Model Predictive Control
31
1.5.3 Model-Reference Adaptive Control
32
1.5.4 Other Control Strategies
33
1.6 Position/Force Control in Micromanipulation
33
1.6.1 Hybrid Control
34
1.6.2 Impedance Control
34
1.6.3 Switching Control
35
1.7 Book Summary
36
References
36
Part I Hysteresis-Model-Based FeedforwardControl
41
2 Feedforward Control Based on Inverse Hysteresis Models
42
2.1 Introduction
42
2.2 System Description and Hysteresis Characterization
43
2.2.1 Experimental Setup
43
2.2.2 Hysteresis Characterization
44
2.3 Hysteresis Modeling
47
2.3.1 Hysteresis Modeling with the Bouc--Wen Model
47
2.3.2 Hysteresis Modeling with the MPI Model
48
2.3.3 Hysteresis Modeling with the LSSVM
51
2.4 Experimental Studies
55
2.4.1 Bouc--Wen Model Results
55
2.4.2 MPI Model Results
56
2.4.3 LSSVM Model Results
59
2.4.4 Model Capability Comparison
61
2.4.5 Generalization Study
63
2.5 Controller Design and Verification
66
2.5.1 Feedforward Controller Design
66
2.5.2 Feedforward Plus Feedback Controller Design
68
2.5.3 Controller Verification
68
2.6 Chapter Summary
73
References
73
3 Feedforward Control Without Modeling Inverse Hysteresis
75
3.1 Introduction
75
3.2 Dynamics Modeling of Hysteretic System
76
3.2.1 Dynamics Modeling with Bouc--Wen Hysteresis
76
3.2.2 Dynamics Modeling with Intelligent Hysteresis Model
77
3.3 Hysteresis Modeling Using LSSVM
78
3.3.1 Regression Model Establishment
78
3.3.2 LSSVM Modeling
78
3.4 Experimental Studies on Hysteresis Identification
80
3.4.1 Experimental Setup
80
3.4.2 Dynamics Model Identification
81
3.4.3 Bouc--Wen Model Results
82
3.4.4 LSSVM Model Results
85
3.5 Experimental Studies on Hysteresis Compensation
89
3.5.1 Feedforward Compensation
89
3.5.2 Feedforward Plus Feedback Control
91
3.6 Chapter Summary
92
References
93
Part II Hysteresis-Model-Free,State-Obser ver-Based Feedback Control
94
4 Model Predictive Discrete-Time Sliding-Mode Control
95
4.1 Introduction
95
4.2 Problem Formulation
97
4.2.1 Dynamics Modeling of a Nanopositioning System
97
4.2.2 Sliding-Mode Controller Design
99
4.2.3 Control Gain Design
101
4.3 DTSMC Design
102
4.3.1 Controller Design and Analysis
102
4.3.2 Tracking Error Bound Analysis
104
4.4 MPDTSMC Design
105
4.4.1 MPDTSMC Controller Design
105
4.4.2 Stability Analysis
107
4.4.3 State Observer Design
108
4.4.4 Tracking and Estimation Error Bound Analysis
109
4.5 Experimental Investigation
110
4.5.1 Experimental Setup
110
4.5.2 Hysteresis Characterization
110
4.5.3 Plant Model Identification
111
4.5.4 Controller Parameter Design
112
4.5.5 Simulation Studies
113
4.5.6 Experimental Testing Results
115
4.5.7 Discussion on System Performance
118
4.6 Chapter Summary
119
References
119
5 Model Predictive Output Integral Discrete-Time Sliding-Mode Control
121
5.1 Introduction
121
5.2 Problem Formulation
122
5.3 MPOIDSMC Design
123
5.3.1 OIDSMC Controller Design
123
5.3.2 MPOIDSMC Controller Design
125
5.4 Experimental Investigations
130
5.4.1 Experimental Setup
130
5.4.2 Plant Model Identification
131
5.4.3 Controller Parameter Design
132
5.4.4 Experimental Studies
134
5.4.5 Discussion on Controller Performance
137
5.5 Chapter Summary
138
References
138
Part III Hysteresis-Model-Free,State-Observer-Free Feedback Control
140
6 Digital Sliding-Mode Control of Second-Order Systems
141
6.1 Introduction
141
6.2 Dynamics Model and Problem Formulation
142
6.3 DSMC Design
144
6.4 Experimental Studies
147
6.4.1 Experimental Setup
147
6.4.2 Plant Model Identification
148
6.4.3 Experimental Results
149
6.4.4 Discussion
159
6.5 Chapter Summary
159
References
160
7 Digital Sliding-Mode Control of High-Order Systems
161
7.1 Introduction
161
7.2 Problem Formulation
162
7.2.1 System Modeling
162
7.2.2 Disturbance Estimation
164
7.3 IODSMC Design
165
7.3.1 Sliding Function Definition
165
7.3.2 Design of IODSMC
166
7.3.3 Robust IODSMC Design
168
7.4 Experimental Setup and Controller Setup
170
7.4.1 Experimental Setup
170
7.4.2 Plant Model Identification
171
7.4.3 Controller Parameter Design
172
7.5 Experimental Results and Discussion
173
7.5.1 Set-Point Positioning Results
173
7.5.2 Sinusoidal Positioning Results
173
7.5.3 Bandwidth Testing Results
175
7.5.4 Robustness Testing Results
176
7.5.5 Further Discussion
178
7.6 Chapter Summary
178
References
179
8 Digital Sliding-Mode Prediction Control
180
8.1 Introduction
180
8.2 Problem Formulation
181
8.2.1 System Modeling
181
8.2.2 Disturbance Estimation
182
8.3 DSMC Design
182
8.3.1 Sliding Function Definition
183
8.3.2 Design of DSMC
183
8.3.3 Error Bound Analysis
185
8.4 DSMPC Design
186
8.4.1 DSMPC Design
186
8.4.2 Stability Analysis
188
8.4.3 Error Bound Analysis
190
8.5 Experimental Studies and Discussion
190
8.5.1 Experimental Setup
190
8.5.2 Plant Model Identification
191
8.5.3 Controller Parameter Design
192
8.5.4 Experimental Studies
192
8.5.5 Further Discussion
196
8.6 Chapter Summary
197
References
197
9 Model-Reference Adaptive Control with Perturbation Estimation
199
9.1 Introduction
199
9.2 Dynamics Modeling and Perturbation Estimation
200
9.2.1 Dynamics Modeling
200
9.2.2 Perturbation Estimation
201
9.3 MRACPE Control Design
202
9.3.1 MRACPE Controller Design
202
9.3.2 Dead-Zone Modification of Adaptive Laws
205
9.3.3 Overview of Control Scheme
205
9.4 Experimental Setup and Controller Setup
206
9.4.1 Experimental Setup
206
9.4.2 Statics Testing and Dynamics Model Identification
208
9.4.3 Controller Setup
209
9.5 Experimental Results and Discussion
210
9.5.1 Set-Point Positioning Testing
210
9.5.2 Sinusoidal Positioning Testing
212
9.5.3 Control Bandwidth Testing
212
9.5.4 Discussion
214
9.6 Chapter Summary
216
References
217
Part IV Applications to Micromanipulation
218
10 Adaptive Impedance Control of Piezoelectric Microgripper
219
10.1 Introduction
219
10.2 Problem Formulation
221
10.2.1 Dynamics Modeling and Perturbation Estimation
222
10.2.2 Impedance Control Problem
223
10.3 ADSMGIC Scheme Design
224
10.3.1 Sliding Function Definition
224
10.3.2 ADSMGIC Design
225
10.3.3 Stability Analysis
226
10.3.4 Evaluation of Steady-State Errors
228
10.4 Experimental Setup and Controller Setup
229
10.4.1 Experimental Setup
229
10.4.2 Force Observer Design
230
10.4.3 Controller Setup
232
10.5 Experimental Results and Discussion
234
10.5.1 Interaction Control Results
234
10.5.2 Discussion on Control Performance
239
10.6 Chapter Summary
240
References
240
11 Position/Force Switching Control of a Miniature Gripper
243
11.1 Introduction
243
11.2 Experimental Setup and Calibration
244
11.2.1 Working Principle of the Gripper
244
11.2.2 Experimental Setup
246
11.2.3 Calibration of Position and Force Sensors
247
11.2.4 Gripping Range Testing
249
11.2.5 Frequency Response Testing
250
11.3 Position/Force Switching Control Scheme Design
251
11.3.1 Event-Based Switching Control Framework
251
11.3.2 Incremental DSMC Position Controller
252
11.3.3 Incremental PID Force Controller
255
11.3.4 Switching Criterion
255
11.4 Experimental Investigations and Discussion
256
11.4.1 Controller Setup
256
11.4.2 Position/Force Switching Control Results
257
11.4.3 Further Discussion
259
11.5 Chapter Summary
262
References
262
Index
264
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