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Ferroelectrics in Microwave Devices, Circuits and Systems - Physics, Modeling, Fabrication and Measurements
Preface
7
Contents
10
Abbreviations
16
Chapter 1 Introduction: Overview of Agile Microwave Technologies
19
1.1 Introduction
19
1.2 Ferroelectrics: The Main Material Properties
20
1.3 Microwave Applications
25
1.4 Other Agile Microwave Technologies
33
1.5 Conclusions
36
References
36
Chapter 2 Physics of the Tunable Ferroelectric Devices
38
2.1 Introduction
38
2.2 Crystal Structure, Non-Polar (Paraelectric) and Polar (Ferroelectric) Phases
39
2.3 Dielectric Models of the Ferroelectric and Paraelectric Phases
41
2.4 Engineering Models of the Dielectric Permittivity
46
2.5 Models of the Loss Tangent
54
2.6 Dielectric Nonlinearities
61
2.7 Thin Films vs. Bulk
63
2.8 Electro-Acoustic Properties
69
2.9 Bulk Conductivity
73
2.10 Conclusions
74
References
74
Chapter 3 Fabrication of Ferroelectric Components and Devices
77
3.1 Introduction
77
3.2 Fabrication of Devices Using Single Crystals
79
3.3 Fabrication of Devices Using Bulk Ceramics
84
3.4 Thick Film, HTCC and LTCC Technologies
90
3.5 Fabrication of Thin Ferroelectric Films
96
3.6 Thin Film Device Processing
114
3.7 Substrate Micromachining and Passivation
122
3.8 Conclusions
124
References
125
Chapter 4 Substrates, Varactors and Passive Components
130
4.1 Introduction
130
4.2 Substrates
131
4.3 Varactors. Basic Designs and Figure of Merit
140
4.4 Equivalent Circuit Model of the Varactors
154
4.5 Low Frequency and Tuning Performances
159
4.6 Microwave Performance
166
4.7 Power Handling Capability and High Power Varactors
177
4.8 Ferroelectrics in Passive Devices as High Permittivity Dielectric
180
4.9 Conclusions
184
References
185
Chapter 5 Ferroelectric Devices
189
5.1 Introduction
189
5.2 Tunable Delay Lines and Delay Line Type Phase Shifters
190
5.3 Phase Shifters
201
5.4 Tunable Filters
210
5.5 Matching Networks (Impedance Tuners)
218
5.6 Power Splitters
220
5.7 Antennas
221
5.8 Nonlinear Devices
222
5.9 TFBARs
226
5.10 Conclusions
231
References
231
Chapter 6 Circuit and System Applications of Tunable Ferroelectric Devices
238
6.1 Introduction
238
6.2 Voltage Controlled Oscillators
239
6.3 Amplifiers
242
6.4 Steerable Phased Array and Beam Antennas
244
References
255
Chapter 7 Modeling
257
7.1 Introduction
257
7.2 Coplanar-Plate Transmission Lines
258
7.3 Multilayer Substrate Coplanar-Plate Capacitors
272
7.4 Parallel-Plate Capacitor
279
7.5 Conclusions
283
Appendix A
285
Appendix B
288
Appendix C
292
Appendix D
297
References
297
Chapter 8 Measurements of the Dielectric Properties
299
8.1 Introduction
299
8.2 Resonant Techniques
301
8.3 Broadband Techniques
329
8.4 Nonlinear Measurements of Ferroelectrics
342
8.5 Switching Time of Ferroelectric Films
344
8.6 Conclusions
346
Appendix E
348
Appendix F
355
Appendix G
358
References
359
Chapter 9 Potentials and Perspectives
362
9.1 Introduction
362
9.2 Multiferroics
363
9.3 Ferroelectric Nanotubes. Ferromagnetic Nanowires
365
9.4 Metamaterials
368
9.5 Bridging the “THz Gap&rdquo
371
9.6 Other Tunable Materials
372
9.7 Other/New Effects
381
9.8 Conclusions
384
References
385
Chapter 10 Concluding Remarks
390
10.1 Introduction
390
10.2 Stabilization of the Temperature Dependences
390
10.3 Nonlinearity and Power Handling Capability
395
10.4 Hysteresis, Retention, Long Term Stability and Noise
395
10.5 Reliability
398
10.6 Integration Trends
399
References
400
Index
402
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